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ISBN 9783843935524

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978-3-8439-3552-4, Reihe Ingenieurwissenschaften

Adeliene Schmitt
Entwicklung eines wirbelschichtbasierenden Chemical Vapour Deposition (CVD) Verfahrens zur Beschichtung von kohäsiven Partikeln mit Kohlenstoff

281 Seiten, Dissertation Universität Erlangen-Nürnberg (2017), Softcover, A5

Zusammenfassung / Abstract

The coating of dielectric particles by very thin functional carbonaceous layers in the range of a few nanometres is aimed to overcome the shortcomings concerning their electrical performance. For this purpose the carbon layer must be engineered conformally, homogeneously and pinhole free around the particles which are very fine and thus cohesive. Consequently the solid handling remains an issue. Hence, there is a necessity to design a suitable reactor and to introduce an appropriate process to achieve tailor made carbon coatings on top of the dielectric particles‘ surfaces.