ISBN 9783843951579

978-3-8439-5157-9, Reihe Mikrosystemtechnik

Sebastian Anzinger
Airborne Capacitive Micromachined Ultrasonic Transducers in Dual-Backplate Technology

203 Seiten, Dissertation Albert-Ludwigs-Universität Freiburg im Breisgau (2022), Softcover, A5

Zusammenfassung / Abstract

This dissertation discusses the development and simulation of novel capacitive micromachined ultrasonic transducers (CMUTs) for airborne gesture control and distance sensing tasks. The CMUTs are fabricated in a dual-backplate (DBP) electromechanical system (MEMS) technology and consist of a few hundred nanometer thin membrane placed between two highly perforated counter-electrodes. Fabricated CMUT modules comprising the MEMS, an application specific integrated circuit (ASIC) and a package are in detail characterized and theoretically investigated via a lumped element-based system-level simulation model. Integrating the highly miniaturized, low-cost and low-driving-voltage DBP CMUTs into phased-array based imaging systems proves their applicability to gesture control tasks in mobile communication devices.