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ISBN 978-3-8439-1762-9

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978-3-8439-1762-9, Reihe Nanotechnologie

Florian Krohs
Development of Novel Operation Modes for Atomic Force Microscopy based Nanofabrication and 3D Nanometrology

162 Seiten, Dissertation Carl von Ossietzky Universität Oldenburg (2014), Hardcover, A5

Zusammenfassung / Abstract

The Atomic Force Microscope (AFM) has evolved into an essential tool for characterization and manipulation with nanometric precision. Particularly, the ongoing trend towards miniaturization in material science, life sciences, semiconductors, and micro and nanotechnology, emphasized the interest in AFM-based techniques. Besides measurement of surface morphology as well as dimensional metrology, the ability to precisely sense and exert forces allows for manipulation of matter with nanoscale accuracy. This opens up a broad range of potential techniques for the development and fabrication of novel nanoelectromechanical devices and systems.

However, the application perspectives of current AFM-based technologies are restricted due to several fundamental limitations. In particular, the serial working principle leads to low throughputs and an increased susceptibility to thermal drift limiting the application perspective for batch fabrication and manipulation of objects with nanometric dimensions. Moreover, current AFM systems are constrained to 2.5D measurements, thus prohibiting a full characterization of 3D structures, such as optical components.

This work addresses the crucial issues mentioned above. Utilizing the AFM as a master making tool, within a process chain for small and medium series of nanostructured polymer components, demonstrates the applicability of AFM-based techniques for cost-effective and scalable nanomanufacturing. Furthermore, to increase accuracy and reliability, and to create the prerequisites for automation of nanohandling tasks, a novel method for thermal drift compensation has been developed and evaluated. Finally, novel scanning modes have been demonstrated based on torsional deflection and AFM probe resonances, enabling 3D characterization capabilities. Thereby, this work represents important steps for the further advancement of AFM technology.