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ISBN 978-3-86853-986-8

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978-3-86853-986-8, Reihe Informatik

Daniel Jasper
SEM-based motion control for automated robotic nanohandling

160 Seiten, Dissertation Carl von Ossietzky Universität Oldenburg (2011), Hardcover, A5

Zusammenfassung / Abstract

Nanoobjects such as carbon nanotubes and other nanowires have become of significant interest for both research and industrial applications due to their unique electrical, chemical, optical and mechanical properties. As humans lack both the motor skills and the sensing capabilities on this scale, nanohandling robots are commonly employed in scanning electron microscopes to precisely characterize individual nanoobjects and assemble nanocomponent-based devices. A key challenge for the automation of such processes is controlling a robot's motion with the required accuracy. In this work, a new method for automatically tracking the position of nanoobjects and robots by conducting line scans with the electron microscope is devised that substantially exceeds the capabilities of existing approaches in terms of resolution, update rate, working range and robustness. Based on this method, visual servoing is implemented for a new robotic system making fast movements along well-defined motion trajectories possible. Position measurement as well as visual servoing is implemented on dedicated hardware leading to high performance and accurate timing. The developed system enables visual servoing along jerk-limited trajectories with deviations of less than 20nm in a few tens of milliseconds. Thereby, this work represents an important step for taking nanohandling from laboratory-sized experiments to high-throughput automation viable for industrial application.